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芯片制造工序英文_芯片制造工序英文缩写

时间:2023-11-04 08:53:41 点击:71 次

Introduction

The manufacturing process of chips plays a crucial role in the production of electronic devices. It involves a series of intricate steps that transform raw materials into functional microchips. In this article, we will explore the English terms for chip manufacturing processes and their corresponding abbreviations. By delving into the details of 12-20 aspects of chip manufacturing, we aim to provide readers with a comprehensive understanding of this complex industry.

1. Wafer Preparation

Wafer Cleaning

The first step in chip manufacturing is wafer preparation. This involves cleaning the silicon wafer to remove any impurities or contaminants. The process typically includes chemical cleaning, rinsing, and drying.

Wafer Inspection

After cleaning, the wafers undergo inspection to ensure their quality. This involves examining the surface for defects, such as scratches or particles, using advanced imaging techniques.

Wafer Polishing

To achieve a smooth and flat surface, the wafers undergo a polishing process. This involves removing a thin layer of silicon using chemical and mechanical polishing techniques.

2. Photolithography

Photoresist Coating

In photolithography, a layer of photoresist is applied to the wafer surface. The photoresist acts as a light-sensitive material that enables the transfer of patterns onto the wafer.

Exposure

The wafer is exposed to UV light through a photomask, which contains the desired pattern. This exposure causes a chemical reaction in the photoresist, creating a latent image.

Developing

After exposure, the wafer undergoes a developing process where the unexposed photoresist is dissolved, leaving behind the patterned areas.

Etching

Etching is used to remove the unwanted material from the wafer surface. This can be done through wet etching, where chemicals selectively remove the exposed areas, or dry etching, which uses plasma to etch the wafer.

3. Ion Implantation

Dopant Selection

Ion implantation involves introducing impurities, called dopants, into the wafer to modify its electrical properties. The selection of dopants depends on the desired characteristics of the chip.

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Ion Beam Acceleration

In this step, ions are accelerated to high speeds and directed towards the wafer surface. The energy and dosage of the ions determine the depth and concentration of the dopants.

Implantation Control

Precise control of the implantation process is crucial to achieve the desired dopant profile. Factors such as beam current, angle, and temperature must be carefully monitored and adjusted.

4. Deposition

Chemical Vapor Deposition (CVD)

CVD is a common technique used to deposit thin films of materials onto the wafer surface. It involves the reaction of precursor gases in a heated chamber, resulting in the formation of a solid film.

Physical Vapor Deposition (PVD)

PVD involves the deposition of materials through physical processes such as evaporation or sputtering. This technique is often used to create metallic layers on the wafer.

Atomic Layer Deposition (ALD)

ALD is a precise deposition technique that involves the sequential exposure of the wafer to precursors, resulting in the growth of thin films with atomic-level control.

5. Etching and Planarization

Chemical Mechanical Planarization (CMP)

CMP is used to achieve a flat and smooth surface on the wafer. It involves the simultaneous action of chemical and mechanical forces to remove excess material and planarize the surface.

Reactive Ion Etching (RIE)

RIE is a dry etching technique that uses reactive gases and plasma to selectively remove material from the wafer. It is commonly used for precise pattern transfer and etching of specific layers.

Chemical Etching

Chemical etching involves the selective removal of material using chemical reactions. Different etchants are used depending on the material to be etched, such as wet etching for silicon dioxide.

Conclusion

The chip manufacturing process involves a wide range of steps, each with its own unique challenges and requirements. By understanding the English terms and abbreviations associated with chip manufacturing processes, readers can gain a deeper insight into this complex industry. From wafer preparation to etching and planarization, each step contributes to the creation of high-performance microchips that power our modern world.

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